采用掠入射X射线衍射技术研究了外延SrTiO3薄膜面内晶格应变随着深度的分布.研究发现不管是较薄的还是较厚的薄膜其面内晶格应变随深度的分布都不是连续变化的,而是可以分为三个区域,即表面区、应变驰豫区、界面区.
The grazing incidence X-ray diffraction technology was adopted to investigate the distribution of the in plain lattice strain dependence of depth for SrTiO3 thin films.We find that not for the thiner not the thicker films,the in plain lattice strain dependence of depth is linear,but can be divided into three areas: surface area,strain relaxiation area,and interface area.