中文摘要：

大气压射频微等离子体放电具有较大的潜在应用价值,但实验研究较困难.为此借助于粒子模拟的方法,在给定的放电间隙下,研究了电流密度及二次电子发射系数（SEEC）对射频微等离子体的放电结构的影响.模拟结果表明,随着输入电流密度的增大,放电空间逐渐由鞘层主导的结构转变为辉光放电结构,电子密度也会随之增大,鞘层电场逐渐增强,同时电子能量概率函数（EEPF）曲线会随之整体向上偏移;而在给定的电流密度下,随着SEEC的增大,放电结构也会逐渐由鞘层主导的结构转变为辉光放电的结构,电子密度会随之增大,同时鞘层电场会逐渐变小,高能电子（＞20 eV）比例也随之减小.最后分析了在大间隙下出现鞘层主导结构的可能性.

英文摘要：

Microplasmas generated in atmospheric radio-frequency （rf） discharges is promising in many applications, butits experimental study is relatively inconvenient. Hence, we conducted a PIC-MCC simulation to study the dischargestructure evolution of atmospheric radio-frequency microplasma （ARMP）between a given electrode gap of 75μn withvarious current density and secondary electron emission coefficient（SEEC）. The simulation results show that, as the cur-rent density increases, the discharge structure gradually varies from sheath-leading discharge into glow discharge;meanwhile, electron density and electron energy both increase, the electric field in the sheath region rises, and the curveof electron energy probability function shifts upward entirely. As for a given current density, increasing SEEC makes thedischarge structure to gradually vary from sheath-leading discharge into glow discharge as well; meanwhile, plasma den-sity rises, the electric field in sheath decreases, and the proportion of electrons with energy higher than 20 eV decreases.In the end, we also discussed the possibility of sheath-leading structure appearing in a relatively larger gap.