中文摘要：

为追求微细尺度条件下超高能量密度的目标，提出了Power MEMS准气体动力循环发动机的概念。鉴于Power MEMS准气体动力循环发动机能够自行提供高压气源的结构特征以及气体静压轴承在性能上的优，点，提出了将气体静压轴承应用于该Power MEMS发动机的研究和Power MEMS准气体动力循环发动机中气体静压径向轴承和止推轴承的结构形式的选择，指出了微细尺度下气体静压轴承的设计要点；运用气体静压润滑的基本原理对气体轴承的结构及运行参数进行了分析，获取了径向轴承和止推轴承的参数设计；通过气体轴承静态性能的计算，从承载能力方面验证了将所设计的气体轴承应用于Power MEMS准气体动力循环发动机中的可行性。

英文摘要：

An original thermodynamic idea for Power MEMS, which is called as quasi gas power cycle, is proposed to further intensify energy density and simplify structure of Power MEMS. Because gas supply with preset high pressure is set up in the Power MEMS engine of quasi gas power cycle, it is convenient for the Power MEMS engine to employ externally pressurized gas bearings to improve the performance of its bearings. Therefore mal design philosophy and structural type of the hyrostatic journal bearing as well as the hyrostatic thrust bearing in the Power MEMS engine are investigated, considering the limiting factor on meso scale. Then the structural and operational parameters are analyzed, and the optimal designs of typical externally pressurized gas bearings are put forward. Moreover the feasibility of the externally pressurized gas bearings applied to the Power MEMS engine is further verified by the calculation of load-carrying capacity of the hyrostatic gas bearings.