中文摘要：

提出一种滑块式6-dof光电产品检测平台机构，采用SOLIDWORKS建立机构的三维实体模型，并将其导入ANSYS软件进行静刚度分析，得到机构在外力作用下两种不同姿态的位移变形云图，由此得出机构刚度的薄弱部位；利用ANSYS的模态分析功能，求出检测平台系统的一到六阶固有频率及相应振型，找出机构运动过程中易引起共振的位置，以避免或抑制机构运动中的共振现象，为机构的设计及实际应用奠定了基础。

英文摘要：

A new kind of 6-dof hybrid mechanisms used for photoelectric inspection platforms was put forward in this paper. Set up 3D model by SOLIDWORKS and import them into ANSYS to analyzing the stiffness, and get the displacement deformation nephogram in two different positions by external force. By this result the weakest point of stiffness in the structure can be got. Then, the modal analysis is done also by ANSYS, and simulate the inherent frequency and mode of vibration from one to six orders. After this, the point of resonance and restrain the resonance can be found, and also lays a theoretical foundation in error analysis of hybrid mechanisms.