中文摘要：

用直流溅射技术及后续高温退火处理,在玻璃表面制备Ag纳米粒子掩膜板,通过控制不同的退火温度和腐蚀时间,研究玻璃表面透过率及润湿性的变化.采用扫描电子显微镜(SEM)观测了Ag纳米粒子的大小和分布.采用UV-Vis分光光度计测定刻蚀后玻璃的透过率变化,采用表面接触角仪测定了刻蚀后玻璃表面润湿性的改变,以及有机氟硅烷处理后表面润湿性的改变.结果表明:退火温度为300℃时,表面Ag纳米粒子更均匀;刻蚀时间为4 min时,可见光透过率提高最多,最高可达93.8%,比原始样品提高了3.8%;刻蚀后玻璃的亲水性更加明显,接触角为9°,后续经过化学修饰后玻璃表面的疏水性有所提高,但提高并不明显,表面接触角为102°.

英文摘要：

The Ag nanoparticles were formed on the glass by DC sputtering and high temperature annealing. By controlling the different annealing temperature and etching time, the change trend transmittance and wettability of glass were studied. The size and distribution of Ag nanoparticles were observed by scanning electron microscopy ( SEM ) . The change of the transmittance of the glass after etching was determined by the UV-VIS spectrophotometer. The surface contact angle instrument was used for the determination of changes in the wettability of glass surface after etching, and after treatment with organic fluorine silane. Results show that when the annealing temperature reached to 300 ℃, Ag nanoparticles were more uniform; when etching time was 4min, transmittance of visible light can be increased up to 93. 8%, and the maximum of the sample is 3. 8% compared with the original sample;the hydrophilic of the glass is more obvious after etching, the contact angle measured was about 9 ° . The hydrophobicity of the surface of the glass was improved after chemical modification, but the enhancement was not obvious, and the contact angle of the surface was 102°.