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High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applica
  • ISSN号：0924-4247
  • 期刊名称：Sensors and Actuators A: Physical
  • 时间：2012.11.11
  • 页码：342-348
  • 相关项目：基于太赫兹超常媒质谐振型NEMS生物传感器的基础研究
作者： X. J. He|Z. Q. Lv|B. Liu|Z. H. Li|
同期刊论文项目
基于太赫兹超常媒质谐振型NEMS生物传感器的基础研究
期刊论文 17
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