中文摘要：

采用溶胶-凝胶法以旋涂的方式在石英玻璃上制备锡掺氧化锌（ZnO∶Sn）透明导电薄膜,在不同的退火气氛下对薄膜进行热处理,以此研究退火气氛对薄膜的微观结构和光电性能的影响。通过X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计和四探针测试仪等手段对薄膜样品进行分析表征,实验表明：不同气氛条件下热处理的ZnO∶Sn薄膜仍为六方纤锌矿结构并沿c轴择优生长,且在可见光范围（400~900 nm）样品的平均透过率均超过80%。其中,在氮气气氛下退火处理的薄膜电阻率减小至3.152×10~（-2）Ω·cm,在惰性气体中热处理有效提高了薄膜的光电特性。

英文摘要：

Tin doped zinc oxide （ZnO ： Sn） transparent conductive films were prepared on quartz glass by sol-gel method, and the films were annealed under different annealing conditions. The effect of the annealing atmosphere on the crystallinity, microstructure and photoelectric properties of the films was studied. The thin films were characterized by X ray diffraction, scanning electron microscopy, four probe tester and UV-vis spectrophotometer. The results show that the ZnO ： Sn thin films under different atmospheres are the structure hexagonal wurtzite and the preferential growth along the c axis, the average transmittance of the films is more than 80% in the visible spectra（400- 900 nm）. Under nitrogen atmosphere annealing treatment the resistivity of the film decreases to 3.152x10-2, which can effectively improve the photovoltaic properties of thin films annealed with inert gases.