中文摘要：

为实现成对微部件反向同步动作的精密定位,设计了一种双足反向型直线超声电机。该电机以矩形板面内一阶纵振和二阶弯振模态为工作模态,通过三角形结构将激励振动放大并在驱动足位置形成椭圆运动,从而驱动两滑条实现反向直线输出。基于工作频率一致性要求进行了电机结构优化,采用谐响应分析验证了设计的可行性。建立定子滑条刚柔接触有限元模型,实现了电机输出性能的仿真。仿真结果说明该电机具有较好的稳定性,空载速度和输出推力分别达到120mm/s和30N。

英文摘要：

A new linear ultrasonic motor with reverse double foot was presented to precisely positioning apair of micro components with inverse synchronized actions.The motor used the first longitudinal and the second bending vibration modes of rectangular plate in-plane as working mode.Excited vibrations amplified by triangular structure were superposed at double foot to form elliptical trajectories,which drove rotors to obtain linear outputs with opposite directions.Motor structural optimization were carried out to achieve the consistency of working frequencies,and harmonic response was analyzed to verify the feasibility of motor design.Motor output performance simulation were performed by rigid-soft contact finite element model of stator and rotor.The simulation results show that the motor presented has a desired stability,and the moving speed and the thrust force can reach120mm/s and 30 Nrespectively.