中文摘要：

基于经过绝缘化处理的支承电极,提出了压控型四轴静电悬浮支承系统的技术方案。首先给出了支承系统的位移测量电路,介绍了在极限工作条件下可以将执行器件功耗降低70%以上的低功耗的高压放大器。推导了电极绝缘条件下的静电力模型,并引入加权系数来表征电极覆盖绝缘膜对静电悬浮力的影响。根据建立的静电力模型设计了控制器并进行了悬浮实验。实验结果表明,支承系统实现了转子的稳定悬浮,说明在合理量化电极绝缘对测量系统和静电力模型的影响条件下,电极绝缘的静电悬浮支承系统可以实现正常工作。

英文摘要：

Based on the insulated electrodes,a technical proposal of voltage-controlled four-axis electrostatic suspension system was proposed.First,the measurement circuit of bearing system was given,and a low power consumption high voltage amplifier was introduced,which could reduce the power consumption of the actuator by over 70% under extreme conditions.Then the formula of electrostatic force acted on the rotor on basis of insulated electrodes was deduced,and a weighting coefficient was introduced to quantize the effect.Based on the model of electrostatic force,the controller was designed,and the suspension experiment was made.Experiment results show that the bearing system can suspend the rotor stably.Under the condition of reasonably quantizing the electrode insulation＇s effects on the measurement circuit and the electrostatic force model,the suspension system can function normally.