中文摘要：

采用双放电腔MW-ECR等离子体源增强磁控溅射和沉积技术，在TiNi合金表面成功地镀制了梯度DLC膜。拉曼光谱分析表明实验获得的薄膜是典型的DLC膜，其结构受梯度层工艺影响。采用原子力显微镜（AFM）观察了薄膜的表面形貌，结果显示其表面较为平整。在Troyde’s模拟体液中的电化学腐蚀实验结果说明，梯度DLC膜显著地增强了TiNi合金基体的抗腐蚀能力。从示差扫描量热仪（DSC）结果看到表面改性没有明显影响TiNi合金基体的使用性能。

英文摘要：

Graded diamond-like carbon （DLC） film containing interim layer was deposited successfully on TiNi alloy by microwave electron cyclotron resonant plasma enhanced magnetron sputtering （MW-ECR PEUMS）. Visible Raman spectra confirm the amorphous carbon feature of the film and techniques of graded layer affect its structure. Smooth surface morphology of the films was observed by atom force microscope （AFM）. The anticorrosion performances of films were studied elementarily in Troyde＇s simulated bodily fluid. The results showed the anti-corrosion performance of TiNi alloy is improved by the existence of graded DLC films. Results of differential scanning calorimetry （DSC） prove the temperature of reversible martensite transformation of TiNi alloy remain invariant after surface modification.