中文摘要：

压印光刻机是一种精密仪器,外界环境激励对压印光刻机的影响很大。橡胶空气弹簧是一种气囊减振器,用橡胶空气弹簧隔离外界环境对压印光刻机的干扰,能保护压印光刻机免受低频激励力的激励,文中阐述压印光刻机低频橡胶空气弹簧单自由度隔振系统的隔振原理,确定橡胶空气弹簧的刚度及隔振系统的固有频率,隔振系统的固有频率及隔振效率的理论结果与实际隔振系统的试验结果相吻合,表明压印光刻机的低频隔振设计是合理可行的。

英文摘要：

Piezo-electric photolithographic equipment is a type of precision instrument.The effect of outside environment on piezo-electric photolithographic equipment is tremendous.Rubber-air spring is a barometric pressure isolator.The disturbance of outside environment on piezo-electric photolithographic equipment can be isolated by rubber-air spring.By this means,piezo-electric photolithographic equipment can be protected from slow-frequency excitation force.The principle of vibration isolation was set forth for s...