中文摘要：

采用多弧离子镀技术在304不锈钢和单晶硅片上沉积Cr CN涂层,通过改变乙炔流量（20-60 sccm）来控制涂层中的碳含量,利用SEM、XRD、XPS、纳米压痕仪、划痕测试仪及摩擦磨损试验对涂层的微观结构及性能进行了对比研究,分析了不同碳元素的含量对涂层组成及性能的影响。结果表明,随着碳含量的增加,各衍射峰整体呈现出下降趋势,涂层由晶态向非晶态转变,化学成分出现明显变化;当乙炔流量为40 sccm时,硬度、弹性模量和结合力达到最高,分别为25 GPa、345 GPa及77 N。与此同时,随着乙炔流量的增加,涂层的摩擦因数及磨损率呈现出先递减后递增的趋势,在乙炔流量为40 sccm时达到最低,涂层表现出较优异的摩擦学性能。

英文摘要：

CrCN coatings were deposited on 304 stainless steel and silicon wafer using the multi-arc ion plating,and the carbon contents were controlled by different C_2H_2 flow rates that ranged from 20 to 60 sccm. Microstructure and mechanical properties of the CrCN coatings were investigated by SEM,XRD,XPS,nano-indentation,scratch tester and friction and wear test. And the effect of different carbon doping contents on tribological performance of CrCN coating in seawater was studied. The results show that with the gradual increase of carbon contents in the CrCN coatings,the diffraction of peak become lower,the coatings transform from crystalline state to amorphous state,and the chemical composition of the coatings changed significantly at the same time. When the C_2H_2 flow rate is 40 sccm,the hardness,elastic modulus and adhesion force of CrCN coating increase to 25 GPa,345 GPa and 77 N,respectively. Meanwhile,both the friction coefficients and wear rates decrease first and then increase with the increase of C_2H_2 flow rates. The friction coefficient and wear rate of the coating get the lowest value when the C_2H_2 flow rate is 40 sccm,which show excellent tribological performance of the CrCN coating.