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Structure analysis of nano-scale dual-step fabricated by Focused Ion Beam
  • 所属机构名称：西安交通大学
  • 会议名称：13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)
  • 时间：2013.8.5
  • 成果类型：会议
  • 相关项目：突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
同会议论文项目
突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
期刊论文 26 会议论文 11 专利 5
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