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New methods to realize sub-wavelength resolution for optical measurement systems
  • 所属机构名称：西安交通大学
  • 会议名称：The 16th International Manufacturing Conference in China (IMCC 2015)
  • 时间：2015.10
  • 成果类型：会议
  • 相关项目：突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
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突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
期刊论文 26 会议论文 11 专利 5
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