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Nanostep fabrication using FIB technology
  • 所属机构名称：西安交通大学
  • 会议名称：3rd International Conference on Advanced in Materials and Manufacturing Processes
  • 时间：2012.12.22
  • 成果类型：会议
  • 相关项目：突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
作者： Chenying Wang|Shuming Yang|Qijing Lin|Zhuangde Jiang|
同会议论文项目
突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
期刊论文 26 会议论文 11 专利 5
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