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Surface uniform wet etching of ZnO films and influence of oxygen annealing on etching properties
  • 所属机构名称：北京大学
  • 会议名称：6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
  • 时间：2011.2.2
  • 成果类型：会议
  • 相关项目：源漏具有复肖特基势垒的MOS场效应晶体管的研究
作者： Zhang, Tao|Sun, Lei|Han, Dedong|Wang, Yi|Han, Ruqi|
同会议论文项目
源漏具有复肖特基势垒的MOS场效应晶体管的研究
期刊论文 5 会议论文 5 专利 6
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