Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing
- 所属机构名称:哈尔滨工业大学
- 会议名称:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Opt
- 成果类型:会议
- 会场:Dalian, China
- 相关项目:常压射频反应等离子体抛光机理研究