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Effect of Deposition Parameters on Nano-Mechanical Properties of DLC Films by PECVD
  • 所属机构名称：北京交通大学
  • 会议名称：Proceedings of CIST2008 & ITS-IFToMM2008 Beijing, CHINA
  • 成果类型：会议
  • 会场：Beijing
  • 相关项目：硅含量对无定形碳化硅薄膜的结构和摩擦学性能的影响
作者： Takahisa Kato|Huiqing Lan|
同会议论文项目
硅含量对无定形碳化硅薄膜的结构和摩擦学性能的影响
期刊论文 26 会议论文 8 专利 1
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