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Research on Silicon Content and Structure Relationship of Amorphous Si-DLC Films by Molecular Dynami
  • 所属机构名称：北京交通大学
  • 会议名称：Proceedings of CIST2008 & ITS-IFToMM2008 Beijing, CHINA
  • 成果类型：会议
  • 相关项目：硅含量对无定形碳化硅薄膜的结构和摩擦学性能的影响
作者： Tomohisa Kumagai|Takahisa Kato|Huiqing Lan|
同会议论文项目
硅含量对无定形碳化硅薄膜的结构和摩擦学性能的影响
期刊论文 26 会议论文 8 专利 1
同项目会议论文
Molecular dynamics simulations on sliding friction between amorphous Si-DLC films
含硅类金刚石膜的研究进展
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Molecular dynamics simulations of structures of amorphous carbon films via deposition
Molecular simulations of sliding process between Fe and DLC films on various boundary conditions
Effect of Deposition Parameters on Nano-Mechanical Properties of DLC Films by PECVD