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Heterodyne planar grating encoder with high alignment tolerance, especially insensitivity to grating
  • 所属机构名称：清华大学
  • 会议名称：ISPMI2012
  • 时间：2012.8.8
  • 成果类型：会议
  • 相关项目：基于二维拼接光栅尺的3自由度大范围位移测量
作者： Can Feng, Lijiang Zeng, Shiwei Wang|
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基于二维拼接光栅尺的3自由度大范围位移测量
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