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Fabrication of diffraction gratings for surface encoders by using a Lloyd’s mirror interferome
  • 所属机构名称：清华大学
  • 会议名称：ISPMI2012
  • 时间：2012.8.8
  • 成果类型：会议
  • 相关项目：基于二维拼接光栅尺的3自由度大范围位移测量
作者： Xinghui LI| Yuki SHIMIZU| So ITO| Wei GAO| Lij|
同会议论文项目
基于二维拼接光栅尺的3自由度大范围位移测量
期刊论文 3 会议论文 6
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