Design and development of composite anodic bonding system based on dielectric barrier discharge meth
- 所属机构名称:苏州大学
- 会议名称:International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2014)
- 时间:2014.9.5
- 成果类型:会议
- 相关项目:基于介质阻挡放电的高效低温阳极键合机理及方法研究