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A MEMS Based Sensor for Large Scale Force Measurement
  • 所属机构名称：北京航空航天大学
  • 会议名称：IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2013)
  • 时间：2013.7.7
  • 成果类型：会议
  • 相关项目：具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
作者： Weihai Chen|Jun Jiang|Jingmeng Liu|Wenjie Chen|
同会议论文项目
具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
期刊论文 9 会议论文 16
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