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Analysis of a Double-phase Regulation and an Ultra Wideband Tunable Micro Electromechanical System R
  • 所属机构名称：西安电子科技大学
  • 会议名称：2015 16th International Conference on Electronic Packaging Technology (ICEPT)
  • 时间：2015.10
  • 成果类型：会议
  • 相关项目：基于屈曲的低压高速大变形微驱动器关键技术研究
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基于屈曲的低压高速大变形微驱动器关键技术研究
期刊论文 20 会议论文 11 著作 2
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