位置：成果数据库 > 会议 > 会议详情页
Run to run control based on adaptive cluster method for high-mix semiconductor manufacturing process
  • 所属机构名称：江苏大学
  • 会议名称：29th Chinese Control Conference, CCC';10
  • 成果类型：会议
  • 相关项目：基于局部建模的大范围工况系统优化控制
作者： Pan T.-H.|Sheng B.-Q.|Chang C.-C.|Wong D.S.-H.|Jang S.-S.|
同会议论文项目
基于局部建模的大范围工况系统优化控制
期刊论文 29 会议论文 9 专利 6
同项目会议论文
Development of adaptive soft sensor using multi-model with online clustering algorithm
Development of statistical model to improve the efficiency of cogeneration system., pp: 7047-7051, 2
A novel pointing algorithm for vehicle satellites' antenna
多模型系统加权函数的全局优化算法
A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputter
Development of novel soft sensor using multi-model with subtractive clustering approach
Virtual metrology algorithm for TFT-LCD manufacutring process
Variable EWMA controller for high mixed semiconductor manufacturing processes