欢迎您!
东篱公司
退出
申报数据库
申报指南
立项数据库
成果数据库
期刊论文
会议论文
著 作
专 利
项目获奖数据库
位置:
成果数据库
>
会议
> 会议详情页
Virtual metrology algorithm for TFT-LCD manufacutring process
所属机构名称:江苏大学
会议名称:2011 8th International Conference on Fuzzy Systems and Knowledge Discovery, FSKD 2011, Jointly with
成果类型:会议
相关项目:基于局部建模的大范围工况系统优化控制
作者:
Sheng B.-Q.|Pan T.-H.|
同会议论文项目
基于局部建模的大范围工况系统优化控制
期刊论文 29
会议论文 9
专利 6
同项目会议论文
Development of adaptive soft sensor using multi-model with online clustering algorithm
Development of statistical model to improve the efficiency of cogeneration system., pp: 7047-7051, 2
A novel pointing algorithm for vehicle satellites' antenna
多模型系统加权函数的全局优化算法
A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputter
Development of novel soft sensor using multi-model with subtractive clustering approach
Run to run control based on adaptive cluster method for high-mix semiconductor manufacturing process
Variable EWMA controller for high mixed semiconductor manufacturing processes