中文摘要：

采用闭环控制电路使振动式微机械陀螺驱动模态保持谐振是提高其灵敏度和稳定性的最为直接、有效的方法。基于锁相控制环路是目前振动式陀螺驱动广泛采用的控制方法之一。对包括陀螺在内的锁相环各个环节进行了建模。对各部分模型线性化处理后,推导了微机械陀螺锁相环控制电路的系统传递函数。传递函数的分析表明该系统是一个有差系统,即压控振荡器发生频率和陀螺谐振频率总是存在一定的频差。文中引入了校正环节来消除稳态误差。采用音叉电容式微机械陀螺进行了实验,转台实验显示刻度因子有所提高,表明该控制方案能够有效的提高陀螺的灵敏度及其稳定性。

英文摘要：

Making vibratory microgyroscopes based on Coriolis principles vibrate at those nature frequency is the directly way to enhance those sensitivity and stability. The phase-lock loop is the widely used control scheme. Each part of the phase-locked loop including the micro- gyroscope has been modeled and linearized. Then the system transfer function deriven shows that there is a constant error between the input and the output. So an calibration module was added to the control loop to enhance the control accuracy. The experiments using a tuning fork vibratory microgyroscope was carried out. The results indicate that the sensitivity of the gyro was better than before.