中文摘要：

当前MEMSCAD软件中可以支持的设计流程比较固定和单一，已不能完全满足由MEMS器件种类日益增多所带来的设计新需求．论文提出了一种可支持任意流程的MEMS设计方法，并基于此建立了设计工具原型系统．该方法采用通用的系统级、器件级和工艺级的三级架构，但以网表、标准格式的实体模型和版图文件分别作为这三个级别设计数据的出入口．设计了相应的信息提取算法及程序，实现了任意两个级别之间的数据自动传递，从而可以支持在该架构下的全部六种设计流程．尤其是由系统级到器件三维实体再到工艺版图的设计流程为国际上率先实现，其从功能逐步综合到器件结构，可有效减少设计的迭代次数．设计实例表明，基于该工具可以针对不同的MEMS器件选择最优的设计路线，显著提高了MEMS的设计效率．

英文摘要：

The design flow in current commercial MEMS CAD software is usually unified in either top-down or bottom-up design method, which can not satisfy the various design requirements for many different MEMS devices by now. This paper established one MEMS CAD prototype system with total six design flows, by far the number of which is the maximal under the current popular MEMS CAD structure. The design tool includes three levels, i.e. system, device and process level, which took the netlist, solid model and layout as the design data flow inlet and outlet for each level separately. The algorithm and program were designed to realize the data auto transmission between every two levels, which built up the foundation of the total six design flows. Especially the design flow from the system to device level and finally to the process level was firstly realized. It realized the conceptive synthesis from the MEMS device＇s function to their geometry, which could greatly reduce the iteration of design. The design examples showed that the designers could choose proper design flows for specific devices with this tool, thus design efficiency was improved.