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Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam
  • ISSN号：1084-7529
  • 期刊名称：Journal of the Optical Society of America A-Optics
  • 时间：2013.9
  • 页码：1768-1771
  • 相关项目：ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
作者： C Jin|C Li|W Deng|Y Chang|
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ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
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