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Fabrication antireflection (AR) coatings for P-polarized 193 nm laser light at an incidence angle of
  • ISSN号：0277-786X
  • 期刊名称：Optics Communications
  • 时间：2013.2
  • 页码：171-175
  • 相关项目：ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
作者： Jin, Jingcheng|Jin, Chunshui|
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ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
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