采用阳极氧化法在电解液NaF水溶液中制备三维连通纳米多孔结构膜层。利用SEM、EPMA、XRD和XPS等方法对多孔膜层的表面形貌、相组成、成分组成进行研究。结果表明:不同浓度的NaF水溶液对多孔膜层的表面形貌、结构特征及孔径尺寸有较大影响;浓度为0.8mol/L时,制备的多孔膜层结构均匀,孔洞呈三维连通状。多孔膜层由Ti、O、Na3种元素组成,物相组成主要有TiO2和少量的Na2TiO3。
The film with three-dimensional and nanometric-pores structure was prepared by anodic oxidation in NaF aqueous solution on titanium substrate. The characteristics of the samples were investigated by SEM, EPMA, XRD and XPS. The results indicate that different concentrations of NaF aqueous solution have great effect on the surface morphology, structure and the pre size; the composition of surface groups is Ti, O and Na; the three-dimensional and nanometric-pores films are composed of TiO2 and NaeTiO3. When the concentration of NaF solution is 0.8 mol/L, the prepared porous films has uniform structure and three-dimensional connective pores.