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中文摘要：
根据电子光学系统的局部对称特性,介绍了电子光学系统的三维有限元局部对称计算方法,分析了电场的对称边界条件和电子运动轨迹的对称边界条件。在此基础上改进了三维有限元的电子光学模拟器EOS,模拟和分析了轴对称电子枪和栅控电子枪,对比了局部对称计算结果与全区域计算结果。由此得出局部对称计算可以在不降低计算精度的情况下,极大地减少计算时间和计算机资源消耗,从而缩短设计周期,提高设计效率。
英文摘要：
In this paper,3D symmetric computation algorithm with finite element method for electron optic system is presented.The symmetric boundary conditions for the electric field and the electron trajectories are derived in detail.The algorithm is implemented in electron optics simulator（EOS）.The Comparison of symmetric computation and full computation shows that the symmetric computation can reduce the computational time and the computer memory effectively without decreasing the computational accuracy.
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