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High rate deposition of microcrystalline silicon films using jet-type inductively coupled plasma che
  • ISSN号：0042-207X
  • 期刊名称：Vacuum
  • 时间：2012
  • 页码：824-828
  • 相关项目：实现界面钝化的单晶硅/非晶硅纳米线异质结太阳电池研究
作者： Zewen Zuo|Yu Wang|Jin Lv|Junzhuan Wang|Lin Pu|Yi Shi|Youdou Zheng|
同期刊论文项目
实现界面钝化的单晶硅/非晶硅纳米线异质结太阳电池研究
期刊论文 10
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