中文摘要：

等厚干涉法测量薄膜厚度设备简易，操作方便，分析直观，在生产中有着广泛的应用．本文探讨了两种等厚干涉法测量薄膜厚度的原理与方法，利用预先形成的薄膜台阶产生空气或透明材料劈尖，单色光在劈尖上下两界面的反射光发生相干叠加产生干涉条纹，通过条纹相关参数的测量，获得薄膜的厚度．通过比较，空气劈尖法较之薄膜劈尖法操作更简易、准确，因而更实用．

英文摘要：

Equal thickness interference method is widely applied in production due to its simple equipment, convenient operation, and uncomplicated analysis process. In this paper, the principle of two methods for measuring the thickness of films based on equal thickness interference was discussed; In these methods, monochromatic light reflects at top and bottom interfaces of the wedge-shaped air or transparent material films, which is formed by utilizing the step of films, and forms the interference fringes. By measuring the parameters of fringes, the thickness of the film can be obtained. Compared to film-wedged method, air-wedged method is more appliable due to its simpleness and precision.