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Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer depo
  • ISSN号：1931-7573
  • 期刊名称：Nanoscale Research Letters
  • 时间：2013.2.2
  • 页码：-
  • 相关项目：高密度低温二次电子辅助脉冲射频等离子体及柔性电子基板表面改性
作者： Edy, Riyanto|Huang, Xiaojiang|Guo, Ying|Zhang, Jing|Shi, Jianjun|
同期刊论文项目
高密度低温二次电子辅助脉冲射频等离子体及柔性电子基板表面改性
期刊论文 10 会议论文 1
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