中文摘要：

采用射频容性耦合等离子体（CCP）对聚对苯二甲酸乙二醇酯（PET）薄膜进行不同气氛下的表面改性处理，研究氩等离子体和氩／氧混合等离子体对PET薄膜表面形貌、成分、亲水性和结合性能的影响．研究结果表明，氩／氧等离子体处理相较于纯氩等离子体处理，由于氧的化学活性，提升了等离子体的化学作用，处理后PET薄膜表面粗糙度增加，并引入大量含氧官能团，显著提高了薄膜的亲水性，提升了其与金膜的黏结力．

英文摘要：

Polyethylene terephthalate （PET） films were exposed to radio frequency capacitive coupled plasma （CCP） to improve their surface properties. The effects of argon plasma and argon-oxygen mixture plasma to the PET film surface morphology, surface composition, hydrophilicity and adhesive properties were studied. The research results showed that the surface roughness of PET film was increased due to the introduction of oxygen in the plasma, and the chemical activity of oxygen enhanced the chemical action of plasma, a large number of functional groups which containing oxygen were produced, as a result, the contact angle of PET film was reduced, and the adhesion properties to Au was promoted.