中文摘要：

利用协同射频等离子体对聚对苯二甲酸乙二醇酯（PET）膜进行表面改性，主要研究了直流（Dc）脉冲偏压协同作用对PET膜表面快速（15s）处理效果的影响。实验表明：Dc脉冲偏压作用后PET表面润湿性得到了明显的改善，接触角可在15s的处理时间内降到200。改性后的PET与Au膜的剥离力比未处理样品提升了近6倍。场发射扫描电镜测试结果发现，薄膜表面刻蚀现象明显，表面粗糙程度增加。经过x射线光电子能谱分析表明，改性后的肿表面生成了大量的含氧极性官能团，使得表面含氧量有了很大的提高。结果表明Dc脉冲偏压可快速有效地提高PET膜表面粗糙程度和含氧官能团数量，进而影响其亲水性和表面黏结性，为进一步改善等离子体表面改性工艺提供了依据。

英文摘要：

The surfaces of polyethylene terephthalate （PET） membrane were modified by exposure of DC pulse-bi- ased RF plasma. The impacts of the surface modification conditions, including the plasma exposure time, D C pulse, and temperature on its hydrophilicity and cohesiveness were evaluated. The modified PET surfaces were characterized with X- ray photoelectron spectroscopy, field emission scanning electron microscopy, and the conventional surface probes. The re- suits show that the plasma exposure strongly affected the PET microstructures and properties. For example, a plasma expo- sure for 15 s reduoed its water contact angle to 20~,and increased the adhesion at the interface of gold film and PET sub- strate by 6 times, possibly because of formation of increased numbers of oxygen-containing,polar functional groups on the roughened PET surfaces.