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Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive micro
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：273-279
  • 语言：英文
  • 相关项目：热传导碳纳米管传感器敏感机理及信号传递方式的探索
作者： Wenzhou Ruan| Youzheng Zhou|Litian Liu|Zheyao Wang|Chaonan Wang|
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热传导碳纳米管传感器敏感机理及信号传递方式的探索
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