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A theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous
ISSN号:0925-4005
期刊名称:Sensors and Actuators B-Chemical
时间:0
页码:598-606
语言:英文
相关项目:热传导碳纳米管传感器敏感机理及信号传递方式的探索
作者:
Youzheng Zhou|Qi Zhang|Litian Liu|Wenzhou Ruan|Chaonan Wang|Zheyao Wang|
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热传导碳纳米管传感器敏感机理及信号传递方式的探索
期刊论文 9
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A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor
Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive micro