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A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor
  • ISSN号：1530-437X
  • 期刊名称：IEEE Sensors Journal
  • 时间：0
  • 页码：246-254
  • 语言：英文
  • 相关项目：热传导碳纳米管传感器敏感机理及信号传递方式的探索
作者： Wenzhou Ruan|Youzheng Zhou|Zheyao Wang|Litian Liu|Qi Zhang|
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热传导碳纳米管传感器敏感机理及信号传递方式的探索
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