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Composition dependence of electronic structure and optical properties of Hf1-xSixOy gate dielectrics
  • ISSN号：0021-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：0
  • 页码：1540-1542
  • 语言：英文
  • 相关项目：纳米场效应晶体管栅极材料的探索-Al、N共掺杂Y2O3超薄膜的制备和物性研究
作者： Meng, G. W.|Zhang, J. P.|Boyd, Ian W.|Li, G. H.|Fei, G. T.|Wang, X. J.|Fang, Q.|Liu, M.|He, G.|Zhang, L. D.|
同期刊论文项目
纳米场效应晶体管栅极材料的探索-Al、N共掺杂Y2O3超薄膜的制备和物性研究
期刊论文 14 会议论文 3 著作 1
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