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Reactive expansion of laser-induced boron/carbon plasma in ECR nitrogen plasma during the deposition
  • 期刊名称：Diamond Relat. Mater.
  • 时间：0
  • 页码：66-72
  • 语言：英文
  • 相关项目：ECR-PLA等离子体的时空运动、激发增强和气相反应
作者： Gao Kun|Xu Ning|Sun Jian|Wu Jiada|Gan Jie|Li Qian|Feng Hui|Ying Zhifeng|
同期刊论文项目
ECR-PLA等离子体的时空运动、激发增强和气相反应
期刊论文 12 会议论文 5
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