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Transparent polycrystalline monoclinic HfO2 dielectrics prepared by plasma assisted pulsed laser dep
  • 期刊名称：J. Vac. Sci. Technol. A
  • 时间：0
  • 页码：011506-1-6
  • 语言：英文
  • 相关项目：ECR-PLA等离子体的时空运动、激发增强和气相反应
作者： Hu Zhigao|Ying Zhifeng|Yu Wenlei|Sun JIan|Xu Ning|Wu Jiada|
同期刊论文项目
ECR-PLA等离子体的时空运动、激发增强和气相反应
期刊论文 12 会议论文 5
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