中文摘要：

提出一种基于MEMS的光栅光调制器，可用于投影显示等相关领域。介绍了其结构、工作原理及其加工流程，对器件进行傅里叶光学分析。分析得出，器件单像素在±1级对比度和光学衍射效率最大值分别为1225和51．4％，形成阵列后理论上最大值分别为无穷大和81％。采用Coventor软件进行光学仿真，得到器件实际情况下衍射花样，器件由于残余应力以及器件下拉时静电力作用产生翘曲变形，光学性能有所降低。

英文摘要：

A grating light modulator based on Micro Electromechanical System （MEMS） is proposed, and it can be used for projection displays and relevant fields. Its structure, operation principle and fabrication process are introduced. After Fourier optical analysis is done, the highest contrast and optical diffracted efficiency of single pixel on ±1^st order is 1225, 51.4% respectively, and infinity, 81% for arrays theoretically. Diffracted intensity distribution under real condition is achieved by optical simulation with Coventor software, the decline of optical performance results from the residual stress and the warp of the device when pulled down by electrostatic force.