中文摘要：

依据傅里叶光学理论，采用在频谱面上放置两种空间滤波器的方法进行信号处理，分析了光栅平动式光调制器在成像面上的强度分布情况，实现了对光能量的调制．分析表明：当滤出±1级谱时，像面上可以得到完全均匀的暗场；但是由于边框和悬臂梁的影响，得不到完全均匀的亮场；当滤出零频谱时，由于边框和悬臂梁的影响，得不到完全均匀的暗场和亮场．设计时，为了要在像面上得到更高的亮度均匀性，需要满足可动光栅栅条宽度为光栅周期的一半，同时应尽量减少悬臂梁和边框的宽度．

英文摘要：

Fourier optics is adopted to analyze the distribution in the imaging plane, using two different filters in frequency spectrum plane. The analysis indicates that collecting 1^st order spectrum can get even dark field, but uneven bright field according to the influence of frame and crab-cantilevers, and collecting 0^th order spectrum can not only get uneven dark field, but also uneven bright field. In order to get higher even brightness field in imaging field, grating period should be double grating width and reduce the frame and crab-cantilevers size.