中文摘要：

介绍了MEMS微针技术在微针制备工艺、力学和流体性能模拟以及透皮给药方面研究的近况。描述了硅、金属和聚合物材料的微针制备工艺,分析了这些材料在MEMS微针应用上的优缺点。比如硅微针制备工艺成熟但是硅的质地太脆;金属微针机械强度高却不易载药;聚合物微针易于批量化复制但是机械强度差。进一步阐述了微针研究取得的进展,总结了微针技术发展需要解决的关键问题。微针制备工艺已经日趋成熟,微针将朝着可复制化、批量化方向发展,微针经皮给药将逐渐从动物实验转移到人体实验,以实现微针研究的最终目的——临床给药。

英文摘要：

The recent progress of the microneedle preparation process,simulation of mechanical and fluidic properties and transdermal drug delivery for the MEMS microneedle technology is introduced.The microneedle preparation processes of silicon,metal and polymer materials are described,and the advantages and disadvantages of those materials in the application of MEMS microneedle are analyzed.For example,the preparation process of silicon microneedle is mature but its texture is too fragile,the metal microneedle has high mechanical strength but is difficult to carry dug,the polymer microneedle is easy to mass replicate but has bad mechanical strength.The achieved progress of the microneedle research are further described,and the key issues which need to be solved for the development of the microneedle technique are summarized.The microneedle preparation technology is becoming mature,and the microneedle will develop toward mass replication.The microneedle transdermal drug delivery experiments will transfer from the animal experiment to the human experiment in order to achieve the final purpose of clinical medicine for the microneedle research.