采用倾斜旋转光刻的方法开展圆锥形异平面微针制备技术研究.通过改进实验室现有设备,以SU8光刻胶结构为模具,通过聚合物材料间的图形转移制备了PDMS异平面圆锥形实心微针的倾角为67°、高度为353μm的微针阵列.该方法具有低成本多材料适用的制备优势.
By improving the existing equipment of our laboratory,the process of inclined and rotating UV lithography in the fabrication of conical out-of-plane micro-needles was researched and conical out-of-plane micro-needles of PDMS were produced through pattern transfer between polymer materials by the SU8 photoresist mold.This method has the advantages of low cost and wide material applicability.The microneedle with the inclination of 67 °and the height of 353 microns was made by this method.