中文摘要：

微电子机械系统（MEMS）微针是目前的一个研究热点,在生物医学上有着广泛的应用。该文介绍了一些新的微针制备方法,对它们的优缺点进行了分析。另外,综述了微针应用研究的最新进展,指出了其面临的挑战和未来的发展趋势。

英文摘要：

MEMS micro-needle is an actual hot point of research,which has a broad prospect in biomedicine.Some new fabrication methods of micro-needle were described in this paper and their advantages and disadvantages were analyzed.In addition,the latest development of research on micro-needle application was reviewed.The challenge and development trend were also pointed out.