中文摘要：

报道了980nm高密度排列大功率垂直腔面发射激光器列阵的研制．列阵单元为蜂窝状密堆积排列，单元台面直径为70μm，氧化孔径为30μm，相邻单元间隔为100μm．制作了含7，19，37个单元的列阵，讨论了它们的阈值电流和远场特性．在室温连续工作条件下，3种列阵的最大输出功率分别为0．26，0．5和0．6W．其中含37个单元的列阵在6A脉冲电流（脉宽30μs，重复频率100Hz）激发下，输出功率达到1．4W．

英文摘要：

The fabrication process of 980nm,densely packed, high power, VCSEL 2D-arrays is reported for the first time in mainland China. The individual elements of the arrays are arranged in a honeycomb-like layout, the mesa diameter of the ele- ment is 70μm, the oxide aperture is 30μm ,and the center-to-center spacing of neighboring elements is 100μm. VCSEL arrays containing 7,19 ,and 37 elements are fabricated, and the characteristics of the threshold current and the far-field angle are discussed. Given CW operation at room temperature,these three kinds of arrays have 0. 26,0. 5,and 0. 6W output power,re- spectively. With a 6A pulse current （30μs at 100Hz） ,the 37-elements array′s output power reaches 1.4W.