设计研制了一种新型的不对称激励的单足直线型驻波超声波电机,电机定子为一块尺寸为26mm×13mm×2mm(X,Y,Z)矩形铜板和对称粘结其上表面的两块压电陶瓷片组成的复合结构。电机只有一种振动模态且只需单一频率驱动,利用不对称激励使驱动足端产生椭圆运动,不需调整不同模态的频率一致性,结构简单。通过有限元分析确定了电机的结构尺寸,由谐响应分析对电机的激励工作机理进行了分析。最后对制作的样机进行了实验测试,试验结果与理论设计一致。在激励电压为150V,激励频率为151.9kHz的激励条件下,测得电机最大输出推力为0.855N,电机速度为260mm/s。
A novel standing wave linear ultrasonic motor with single driving foot and by asymmetric exciting has been developed. The laminated plate stator consists of one rectangular brass plate, which has the size of 26 mm× 13 mm× 2 mm (X,Y,Z), and two piezoelectric ceramic plates bonded on the surface of the stator. The motor has onlyone mode and is excited by one frequency. Elliptic motion is formed on the driving foot by asymmetric exciting. The motor has simple structure. The dimensions of the stator are determined carefully using the finite element method. The motion of the motor is analyzed by harmonic response analysis. Then, the prototype motor is tested experimentally. The test result is close to the design. When a sine signal with driving voltage of 150 V and driving frequency of 151.9 kHz is applied, the velocity reaches 260 mm/s and the maximum thrust force reaches 0. 855 N.